MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, cilt.32, ss.137-144, 2015 (SCI İndekslerine Giren Dergi)
In this study, both the metal-semiconductor (MS) and metal-polymer-semiconductor (MPS), (Al/C20H12/P-Si), type Schottky barrier diodes (SBDs) were fabricated using spin coating method and they were called as D-1 and D-2 diodes, respectively. Their electrical characterization have been investigated and compared using the forward and reverse bias I-V and C-V measurements at room temperature. The main electrical parameters such as ideality factor (n), reverse saturation current (I-o), zero-bias barrier height (Phi(Bo)), series (R-s) and shunt (R-sh) resistances, energy dependent profile of interface states (N-ss), the doping concentration of acceptor atoms (N-A) and depletion layer width (W-D) were determined and compared each other and literature. The rectifying ratio (RR) and leakage current (I-R) at +/- 3 V were found as 2.06 x 10(3), 1.61 x 10(-6)A and 15.7 x 10(3), 2.75 x 10(-7) A for D-1 and D-2, respectively. Similarly, the R-s and R-sh values of these diodes were found as 544 Omega, 10.7 M Omega and 716 Omega and 1.83 M Omega using Ohm's Law, respectively. In addition, energy and voltage dependent profiles of N55 were obtained using the forward bias I-V data by taking into account voltage dependent effective barrier height (Phi(e)) and n and low-high frequency capacitance (C-LF-C-HF) methods, respectively. The obtained value of N-ss for D-2 (MPS) diode at about the mid-gap of Si is about two times lower than D1 (MS) type diode. Experimental results confirmed that the performance in MPS type SBD is considerably high according to MS diode in the respect of lower values of N-ss, R-s and I-o and higher values of RR and R-sh. (C) 2015 Elsevier Ltd. All rights reserved.