JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, vol.209, no.4, pp.2008-2014, 2009 (SCI-Expanded)
Laser micromachining can replace mechanical removal methods in many industrial applications, particularly in the processing of difficult-to-machine materials such as hardened metals, ceramics, and composites. it is being applied across many industries like semiconductor, electronics, medical, automotive, aerospace, instrumentation and communications. Laser machining is a thermal process. The effectiveness of this process depends on thermal and optical properties of the material. Therefore, laser machining is suitable for materials that exhibit a high degree of brittleness, or hardness, and have favourable thermal properties, such as low thermal diffusivity and conductivity. Ceramics which have the mentioned properties are used extensively in the microelectronics industry for scribing and hole drilling.