Conversion efficiency calculations for soft x-rays emitted from tin plasma for lithography applications

DEMİR P., Demir P., KAÇAR E., Bilikmen S., DEMİR A.

11th International Conference on X-Ray Lasers, 2008, Belfast, United Kingdom, 17 - 22 August 2008, vol.130, pp.281-287, (Full Text)

• Publication Type: Conference Paper / Full Text
• Volume: 130
• Doi Number: 10.1007/978-1-4020-9924-3_32
• City: Belfast
• Country: United Kingdom
• Page Numbers: pp.281-287
• Kocaeli University Affiliated: Yes